List of Servo Motor Products
In our product model name, “AM” is added in the end for the robot using the servo motor .
| Model Name | Arm/End-Effector | Robot Model Type | Motor Type | Carrying Object |
|---|---|---|---|---|
| GCR4210 (AC servo motor) |
Single arm | 4-Axis Horizontal and Multi-Joint Type | AC servo motor | Up to 300mm silicon wafer |
| GCR4280 (For 300mm wafer) |
Single arm | 4-Axis Horizontal and Multi-Joint Type | AC servo motor | SEMI standard up to 300mm silicon wafer |
| GTCR5280 (For 300mm wafer) |
Single arm | 5-Axis Horizontal and Multi-Joint Type | AC servo motor | Up to 300mm silicon wafer |
| GTFR5280 (For 300 mm wafer) |
Single arm | 5-Axis Horizontal and Multi-Joint Type | AC servo motor (Batteryless) | Up to 300 mm silicon wafer |
| GTVCR5330 | Single arm | 5-Axis Horizontal and Multi-Joint Type | AC servo motor | Wafer up to 300mm |
| JCR4400 (Transfer Robot with Auto alignment for PLP) |
Single arm | 4-Axis Horizontal and Multi-Joint Type | AC servo motor | Substrate 500 mm x 500 mm |
| JVCR4330 (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED) |
Single arm | 4-Axis Horizontal and Multi-Joint Type | AC servo motor | 700 mm susceptors (10 kg) |
| MCR3160C | Single arm | 3-Axis Cylindrical Coordinate | AC servo motor | Wafer up to 300mm |
| MTCR4160 | Twin arm | 4-Axis Cylindrical Coordinate | AC servo motor | Wafer up to 300mm |
| MTCR4200 | Twin arm | 4-Axis Cylindrical Coordinate | AC servo motor | Wafer up to 300mm |
| STVCR4160 (Servo motor type) |
Twin arm | 4-Axis Cylindrical Coordinate | AC servo motor | Wafer up to 300mm |
| STVCR4190 (Servo motor with absolute encoder) |
Twin arm | 4-Axis Cylindrical Coordinate | AC servo motor | Wafer up to 300mm |