Robot for Semiconductor

GTVCR53305-Axis Horizontal and Multi-Joint Type Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	GTVCR5330
Environment	Clean room atmosphere (Temp. 15°C to 40°C)
Environment	Process chamber (Max. Temp. 450°C)
Arm	Single arm
Operating Range	635mm (3rd joint center)
Vertical Stroke	60mm
Payload Capacity	Below 4kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
GTVCR5330-060-AM		60mm

The image above and the video are of GTVCR5330-060-AM (*The robot in the image and video uses the four end-effectors.)

Characteristics

Achieved cost reduction while maintaining the performance and functions of conventional robot GTVHR5000 series.
Transfers to the parallel stages in the vacuum chamber and supports various layouts, reducing footprint and vacuuming volume.
Simplification of the chamber layout leads to the cost reduction.
Suitable to the inline layout.
Execution of origin search is not required by using the servo motors with absolute encoders.

Arm lineup: 280mm, 330mm
Magnetic fluid sealing is used for arm joint.
Vacuum sealing: Magnetic fluid sealing and bellows are used.
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
Twin end-effector reduces the wafer swap time.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
AC servo motors with absolute encoders installed in all axes.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with passive edge or edge grip type end-effector, and friction retaining by O-ring.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of GTVCR5330-060-AM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	GTVCR5330-060-AM
Carrying Object	Wafer up to 300mm
Robot Model Type	Horizontal and multi-joint type	Control Axis	5-axis
Motor Type	AC servo motor
Operating Range	3rd Joint Center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	635mm	360deg	60mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	640mm/sec	160deg/sec	60mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	950mm/sec	200deg/sec	85mm/sec
Resolution	1st Joint Axis (J1-axis) 2nd Joint Axis (J2-axis)	3rd Joint Axis (J3-axis) 3rd Joint Axis (J5-axis)	Z-Axis (J4-axis)
Resolution	0.00081deg 0.00081deg	0.00072deg 0.00072deg	0.98µm
Repeatability	Within ±0.1mm
Handling Level	219mm (Mounting level to upper end-effector level)
Cleanliness	Magnetic fluid sealing and filter
Vacuum resistance	1 x 10^-6Pa
Utility	Power: AC200 to 230V 2kVA 50/60Hz
Specifications of Controller
Controller Model	C5000S series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single end-effector
...Twin end-effector
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking