Robot for Semiconductor

JVCR4330 (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)

Model Name	JVCR4330
Environment	Clean room atmosphere
Arm	Single arm
Operating Range	1290 mm (robot center to substrate center)
Vertical Stroke	60 mm
Payload Capacity	10 kg

Product Model		Vertical Stroke
JVCR4330-060-AM		60 mm

Horizontal and Multi-Joint Type Vacuum Robot for Micro LED.

Standard specifications with JVCR4330-060-AM (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)
Specifications of Robot
Robot Model	JVCR4330-060-AM
Carrying Object	700 mm susceptors (10 kg)
Substrate Holding Method	Friction retaining by O-ring.
Robot Model Type	Horizontal and multi-joint type	Control Axis	4-axis
Motor Type	AC servo motor
Operating Range	From robot center to wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	1290 mm	360 deg	60 mm
Carrying Speed	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed	640 mm/4.0 sec	360 deg/5.0 sec	60 mm/2.0 sec
Resolution	1st Joint Axis (J1 axis)	2nd Joint Axis (J2 axis)	3rd Joint Axis (J3 axis)
	8.1x10-4 deg	8.1x10-4 deg	7.2x10-4 deg
	Z-axis (J4 axis)
	0.98 µm
Repeatability	Within ±0.1 mm
Cleanliness	Robot main body: 0.1 µm/cf Class 1
Utility	Power: AC200V Single phase ±10% 4.0 kVA
Mass	Robot main body: Approx. 90 kg
Specifications of Controller
Controller Model	C5000S series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)