Robot for Semiconductor
MTCR42004-Axis Cylindrical Coordinate Clean Robot
Product Video |
Usage Environment/SpecificationsProduct Profile
List of Product Model
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Characteristics
Designed for handling wafers in a production line or inspection line of semiconductor.
High-speed handling by AC servo motor and superior cost performance compared to MTHR type.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Twin-arm reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Please contact us for the detailed specifications.
| Outline Drawing (Standard) |
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Option
End-Effector
| Model Name | Size of Carrying Object | End-effector Type (Thickness) | Wafer Holding Method |
|---|---|---|---|
| SC-IW-200 | 3 inch, 100mm to 200mm | I-shape (2mm) | Vacuum suction |
| SC-IW-240 | 3 inch, 100mm to 300mm | I-shape (2mm) | Vacuum suction |
| SC-YW-200 | 100mm to 200mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-227 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-240 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| 3D-02229 | 150mm～300mm | Y-shape (2mm) | Vacuum suction |
| SC3-YW-240 | 300mm | Y-shape (3mm) | Vacuum suction |
| 3D-01661 | 300mm | Y-shape (3mm) | Vacuum suction |
| SC3-IW-240 | 300mm | I-shape (3mm) | Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Single arm
- ...Twin arm
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking