Robot for Semiconductor

STVCR4160 (Servo motor type)4-Axis Cylindrical Coordinate Clean Robot

Usage Environment/Specifications

Product Profile

Model Name	STVCR4160
Environment	Vacuum (Temp. 15°C to 50°C)
Environment	Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Arm	Twin arm
Operating Range	315mm (3rd joint center)
Vertical Stroke	50mm
Payload Capacity	Below 2kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
STVCR4160-050-AM		50mm

The image above is of STVCR4190-050-SM.

Characteristics

Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to STVHR series.
Compatible with STVHR series and it is possible to replace or upgrade into STVCR series.
Execution of origin search is not required by using the servo motors with absolute encoders.

Magnetic fluid sealing is used for arm joint.
Vacuum sealing: Magnetic fluid sealing and bellows are used.
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
Twin-arm reduces the wafer swap time.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
AC servo motors with absolute encoders installed in all axes.
High-speed, high-accuracy wafer handlingby S-curved speed control.
AC servo motor or 2-phase pulse motor type is selectable.
Wafer holding: end-effector with passive edge or edge grip type End-effector.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of STVCR4160-050-AM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	STVCR4160-050-AM
Carrying Object	Wafer up to 300mm
Wafer Holding Method	By end-effector with passive edge or edge grip type end-effector
Robot Model Type	Cylindrical coordinate type	Control Axis	4-axis
Motor Type	AC servo motor
Operating Range	3rd joint center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	600mm	330deg	50mm
Carrying Speed	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed	520mm/2.0sec	330deg/2.7sec	50mm/1.5sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 4.91µm	0.00088deg	0.488µm
Repeatability	Within ±0.1mm
Cleanliness	Magnetic fluid sealing and filter
Vacuum resistance	1.33×10^-6Pa
Utility	Power: AC200V single phase ±10% 1kVA

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking