Robot for Semiconductor

GTFR5280 (For 300 mm wafer)5-Axis Horizontal and Multi-Joint Type Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	GTFR5280
Environment	Clean room atmosphere
Arm	Single arm
Operating Range	553 mm (3rd joint center)
Vertical Stroke	320 mm
Payload Capacity	Below 4kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
Standard	GTFR5280-320-DM	320 mm

The image above and the video are of GTFR5280-320-DM.

Characteristics

5-Axis horizontal and multi-joint type clean robot for 300 mm wafer.
A twin end-effector mounted on its single-arm has the same function as a twin-arm robot.
Designed for handling wafers in EFEM.
Compared to our conventional GTCR model, the cycle time is improved by reducing the operation prohibited area and the influence of speed limit.

3 FOUP access is available without a track.
Twin end-effector reduces the wafer swap time.
AC servo motors with absolute encoders installed in all axes. (Batteryless)
Wafer holding: end-effector with vacuum suction, passive edge, edge grip.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model	GTFR5280-320-DM
Carrying Object	Up to 300 mm silicon wafer
Wafer Holding Method	By vacuum suction
Robot Model Type	Horizontal and multi-joint type	Control Axis	5-axis
Motor Type	AC servo motor (Batteryless)
Operating Range	From the robot center to the wafer center	Vertical Stroke (Z-axis)
Operating Range	893 mm	320 mm
Carrying Speed (Ave.)	Arm (R-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	900 mm/sec（when cylindrical operation）	320 mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	1,500 mm/sec（when cylindrical operation）	540 mm/sec
Repeatability	Within ±0.05 mm
Cleanliness	ISO Class 1
Utility	Power: AC200V Single phase ±10% 2 kVA; Vacuum: -75 kPa or more
Mass	Approx. 80 kg

Outline Drawing (Standard)

Option

Other Option

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single end-effector
...Twin end-effector
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking