Troubleshooting: Common to All The Semiconductor Robots
Initial operation troubles
Vacuum troubles
Operation/Control troubles
In case the robot arm hits something
- Execute the adjustment at your own risk.
We recommend taking our training lesson.
- In case the robot arm hits something:
- Arm (PDF)
- Arm origin adjusment manual for single arm (PDF)
- Arm origin adjusment manual for twin arm (PDF)
When error occurs
- When error occurs:
- Errors 01-06 (PDF)
- Error *1 (PDF)
- Error *2 (PDF)
- Error *3 (PDF)
- Error *4 (PDF)
- Error *07 (PDF)
- Error *08 (PDF)
- Error *75 (PDF)
- Error *77 (PDF)