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Wafer-Search Operation Procedure

13：Output the results of wafer-search to I/O

After executing wafer-search (10: Execution of wafer search ), output the results of wafer-search to I/O.
Output the results of wafer-search via serial communication.
Input the following commands for configuration:

Select: Designate the number of slots to be output

When executing the commands, the data whether there are wafers or not in the slots which correspond to the output data is output to I/O.
"ON" : Wafer is detected.
"OFF": Wafer is not detected.
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