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Wafer-Search Operation Procedure

14：Output the results of wafer-search and the wafer condition to I/O

After executing wafer-search (10: Execution of wafer search), output the results of wafer-search and the wafer condition to I/O.
Output the results of wafer-search and the wafer condition via serial communication.
Input the following commands for configuration:

Select: Designate the number of slots to be output

When executing the commands, the data whether there are wafers or not in the slots which correspond to the output data and the wafer conditions are output to I/O.
Output the data whether there are wafers or not to the output data 0-3, and output the wafer conditions to the output data 4-7.
◆Whether there are wafers or not:
      "ON" : Wafer is detected.
      "OFF": Wafer is not detected.
◆Wafer condtions:
  When the data whether there are wafers or not is "ON":
      "ON" : Normal
      "OFF": Double
  When the data whether there are wafers or not is "OFF":
      "ON" : Cross-slotted
      "OFF": None (including errors other than double or cross-slotted）
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