Wafer-Search Operation Procedure
12: Reading out of the detection width of wafer-search
- After executing wafer-search (10: Execution of wafer-search), read out the detection width of wafers.
- Read out the detection width of wafer-search via serial communication. Input the following commands for configuration:
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- The results of detected width of wafers are to be read out.
- The response from the controller is as follows:
- Response
-
～
- Return value and Search results
The data of detection width- Three-digit decimal number without signs
- Read out the data equivalent to the number of cassette slots only (3: Setting of the number of cassette slots (WFC setting)).
- For example) To output “robot $1, 25 slots of the cassette with wafers placed in all slots, neither cross-slotted nor thickness errors, and the detected widths are all 100”, the following will be displayed.
- ＞＄1100,100,100,100,100,100,100,100,100,100,100,100,100,100,100,100,100,100,
100,100,100,100,100,100,100
- *The thickness is different form the actual thickness of wafers.
- *When speed of wafer-search (8: Setting of the speed of wafer-search (WSP setting)) becomes faster, the detection width tends to be smaller than the actual wafer width.
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