Wafer-Search Operation Procedure

10: Execution of wafer-search

Before executing the start position of wafer-search, make sure that the robot is in the start position of wafer-search.

Execute wafer-search via serial communication.
Input the following commands for configuration:

This operation turns on the wafer detection sensor which executes wafer-search.

This operation executes the performance of wafer detection only.

---

---

[an error occurred while processing this directive]