JEL-Leading Manufacturer of Clean Robot

Wafer-Search Operation Procedure

3: Setting of the number of cassette slots (WFC setting)

Set the number of cassette slots to be used.
Set the number of cassette slots via serial communication.
Input the following commands for configuration:

(When the robot is $1, the commands are: $1WFC ****)
 Input the Z-axis value displayed in the teaching box in "DEC".
Obtain the current designated data
Data to be set
cassette
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