Introduction Video of Handling

300mm SORTER SYSTEM (4-port inline type)

300mm SORTER SYSTEM (4-port inline type with 300 wafers/h throughput): Pick up 300 mm wafers from FOUP cassette and sort. Loading/unloading wafer is also available besides sorting. Other types of SORTER SYSTEM: 300mm SORTER SYSTEM (4-port facing type with 400 wafers/h throughput) 300mm SORTER SYSTEM (4-port inline type with 600 wafers/h throughput) 150mm SORTER SYSTEM