Introduction Video of Handling

System for handling 2 inch wafer

Smallest robot/aligner in the industry for downsizing of system. Help to minimize transferring parts or vacuum transfer chamber. TSCR3060N (Atmosphere robot for 2 inch wafer) Compared to JEL’s standard atmosphere robot: Minimized footprint by 75% (□115x130mm), volume ratio by 80% TSVCR3060N (Vacuum robot for 2 inch wafer) Compared to JEL’s standard vacuum robot: Minimized footprint by 65% (φ95mm), volume ratio of driving unit by 75% SAL1021 (Atmosphere aligner for 2 inch wafer) Compared to JEL’s standard atmosphere aligner: Minimized footprint by 80% (□85x100mm), volume ratio by 80%