JEL-Leading Manufacturer of Clean Robot



System

SORTER SYSTEM150mm

SORTER SYSTEM for 150mm

Product Video

Usage Environment/Specifications


Product Profile

Product ModelSORTER SYSTEM
EnvironmentClean room atmosphere
Wafer Size150mm
Carrying ObjectGlass, Sapphire, GaAs wafer
Contact us for the detailed specifications.
Throughput140 wafer/h (Process time excluded)
  • The image above and the video are of SORTER SYSTEM for 150mm.

Characteristics

  • Access to 4 cassettes is available without a track by the horizontal and multi-joint type robot (GCR4210-500-AM).
  • 500mm Z-stroke can access the vertically-setting cassettes.
  • Flip unit of robot can handle wafers without contacting process side.
  • Mapping sensor is installed to the wrist-block unit.
  • Open/Close detection sensor is installed to the door and locked during operation.
  • Aligner (SAL3361GR) for glass wafer is installed.
  • Communication with users' system can be changed.
  • Customization is available according to user's needs.

Standard Specifications

Carrying Object 150mm wafer (Glass, Sapphire, GaAs)
Throughput 140 wafer/h (Process time in the system is not included)
<GCR4210-500-AM>
Operating range From the robot center to the wafer center Rotation Angle
(Theta-axis)
Vertical Stroke
(Z-axis)
Flip axis
672mm 335deg 500mm 180deg
Carrying Speed
(Ave.)
Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke
(Z-axis)
550mm/sec 300deg/sec 300mm/sec
Carrying Speed
(Max.)
Arm (R-axis) Rotation Angle
(θ-axis)
Vertical Stroke
(Z-axis)
900mm/sec 400deg/sec 450mm/sec
Carrying Speed
(w/o flip unit)
Arm (R-axis) Rotation Angle
(θ-axis)
Vertical Stroke
(Z-axis)
1800mm/sec 540deg/sec 500mm/sec
Repeatability Within ±0.1mm
<SAL3361GR>
Positioning accuracy Centering: Within ±0.2mm  Flat locating: Within±0.2deg
Positioning time Notch search: Within 3 sec (Pick-up/placing time is not included.)
Positioning correction range Within 4mm radius
<System>
Wafer holding method By vacuum suction with end-effector
Cleanliness ISO Class 2 (ISO14644)
Footprint 640mm×835mm (Excluding touch panel)
Mass Approx. 350kg
Utility Power:AC200V Single phase 15A   Vacuum: -53kPa or more (w/vacuum type end effector)
Outline Drawing (Standard)
SORTER SYSTEM for 150mm

Option

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking