System

SORTER SYSTEM150mm

Product Model	SORTER SYSTEM
Environment	Clean room atmosphere
Wafer Size	150mm
Carrying Object	Glass, Sapphire, GaAs wafer
Carrying Object	Contact us for the detailed specifications.
Throughput	140 wafer/h (Process time excluded)

Access to 4 cassettes is available without a track by the horizontal and multi-joint type robot (GCR4210-500-AM).
500mm Z-stroke can access the vertically-setting cassettes.
Flip unit of robot can handle wafers without contacting process side.
Mapping sensor is installed to the wrist-block unit.
Open/Close detection sensor is installed to the door and locked during operation.
Aligner (SAL3361GR) for glass wafer is installed.
Communication with users' system can be changed.
Customization is available according to user's needs.

<GCR4210-500-AM>
Carrying Object	150mm wafer (Glass, Sapphire, GaAs)
Throughput	140 wafer/h (Process time in the system is not included)
Operating range	From the robot center to the wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)	Flip axis
Operating range	672mm	335deg	500mm	180deg
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	550mm/sec	300deg/sec	300mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (θ-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	900mm/sec	400deg/sec	450mm/sec
Carrying Speed (w/o flip unit)	Arm (R-axis)	Rotation Angle (θ-axis)	Vertical Stroke (Z-axis)
Carrying Speed (w/o flip unit)	1800mm/sec	540deg/sec	500mm/sec
Repeatability	Within ±0.1mm
<SAL3361GR>
Positioning accuracy	Centering: Within ±0.2mm Flat locating: Within±0.2deg
Positioning time	Notch search: Within 3 sec (Pick-up/placing time is not included.)
Positioning correction range	Within 4mm radius
<System>
Wafer holding method	By vacuum suction with end-effector
Cleanliness	ISO Class 2 (ISO14644)
Footprint	640mm×835mm (Excluding touch panel)
Mass	Approx. 350kg
Utility	Power：AC200V Single phase 15A Vacuum: -53kPa or more (w/vacuum type end effector)

Outline Drawing (Standard)

*The teaching box appeared in the table may be unavailable depending on the specifications.