System
SORTER SYSTEM150mm
Product Video |
Usage Environment/SpecificationsProduct Profile
|
Characteristics
- Access to 4 cassettes is available without a track by the horizontal and multi-joint type robot (GCR4210-500-AM).
- 500mm Z-stroke can access the vertically-setting cassettes.
- Flip unit of robot can handle wafers without contacting process side.
- Mapping sensor is installed to the wrist-block unit.
- Open/Close detection sensor is installed to the door and locked during operation.
- Aligner (SAL3361GR) for glass wafer is installed.
- Communication with users' system can be changed.
- Customization is available according to user's needs.
Standard Specifications
Carrying Object | 150mm wafer (Glass, Sapphire, GaAs) | |||
---|---|---|---|---|
Throughput | 140 wafer/h (Process time in the system is not included) | |||
<GCR4210-500-AM> | ||||
Operating range | From the robot center to the wafer center | Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
Flip axis |
672mm | 335deg | 500mm | 180deg | |
Carrying Speed (Ave.) |
Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) |
|
550mm/sec | 300deg/sec | 300mm/sec | ||
Carrying Speed (Max.) |
Arm (R-axis) | Rotation Angle (θ-axis) |
Vertical Stroke (Z-axis) |
|
900mm/sec | 400deg/sec | 450mm/sec | ||
Carrying Speed (w/o flip unit) |
Arm (R-axis) | Rotation Angle (θ-axis) |
Vertical Stroke (Z-axis) |
|
1800mm/sec | 540deg/sec | 500mm/sec | ||
Repeatability | Within ±0.1mm | |||
<SAL3361GR> | ||||
Positioning accuracy | Centering: Within ±0.2mm Flat locating: Within±0.2deg | |||
Positioning time | Notch search: Within 3 sec (Pick-up/placing time is not included.) | |||
Positioning correction range | Within 4mm radius | |||
<System> | ||||
Wafer holding method | By vacuum suction with end-effector | |||
Cleanliness | ISO Class 2 (ISO14644) | |||
Footprint | 640mm×835mm (Excluding touch panel) | |||
Mass | Approx. 350kg | |||
Utility | Power:AC200V Single phase 15A Vacuum: -53kPa or more (w/vacuum type end effector) |
Outline Drawing (Standard) |
---|
Option
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking