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SORTER SYSTEM (4-port inline type with 300 wafers/h throughput)

SORTER SYSTEM(300 wafers/h)

Product Video

Usage Environment/Specifications

Product Profile

Product Model	SORTER SYSTEM
Environment	Clean room atmosphere
Wafer Size	300mm
Carrying Object	Silicon wafer
Carrying Object	Contact us for the detailed specifications.
Throughput	300 wafers/h

The image above and the video are of SORTER SYSTEM (4-port inline type with 300 wafers/h throughput).

Characteristics

Compliance : SEMI Standard (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600)
Aligner with buffer function is available for high-throughput.
Wafer ID reader is available. (Reading both sides of wafer is an option)

Standard Specifications

Standard specifications for 4-port inline type (Robot 1 set, Track 1 set)
Carrier	300mm FOUP (for 25 wafers) Compliance: SEMI E47.1, E62
Carrying Object	300mm Silicon wafer (Thickness: 775µm)
Throughput	300 wafers/h
Cleanliness	ISO Class 2 (when equipped with FFU)
Dimension	W 1250mm x D 2500mm x H 1900mm
Mass	Approx. 800kg
Utility	Power: AC200V Single phase ±10% 2kVA
	Dry air: 0.5MPa±10%
	Vacuum: -53kPa or more

Option

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking