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Wafer-Search Operation Procedure

4: Setting of the minimum detection width of wafer (WWN setting)

Set the minimum detection width of wafer to be used.
When the width detected in wafer-search is smaller than the minimum detection width, it is judged as thickness error.
Set the minimum detection width of wafer via serial communication.
Input the following commands for configuration:

Input the minimum detection width in “DEC”.
Obtain the current designated data
Data to be set
minimum detection width of wafer
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