Wafer-Search Operation Procedure
2: Setting of the highest slot of the cassette (WHI setting)
| 〔1〕 | Teach the robot the position where a wafer in the highest slot is detected. |
| 〔2〕 |  After moving the robot, press the dot button on the teaching box to turn on the light source of a wafer search sensor. *The procedure varies depending on specifications. For details, please refer to the instruction manual. |
| 〔3〕 | With the teaching box, check the Z-axis value of the center of wafer thickness in the highest slot (see Figure 1) and set the value (see Figure 2). |
| 〔4〕 | Set the position data via serial communication. Input the following commands for configuration: 
(When the robot is $1, the commands are: $1WHI ****) Input the Z-axis value displayed in the teaching box in "DEC". Obtain the current designated dataData to be set |
Figure 1
Figure 2
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