Wafer-Search Operation Procedure
1: Setting of the lowest slot of the cassette (WLO setting)
| 〔1〕 | Teach the robot the position where a wafer in the first slot (lowest slot) is detected. |
| 〔2〕 |  After moving the robot, press the dot button on the teaching box to turn on the light source of a wafer-search sensor. *The procedure varies depending on specifications. For details, please refer to the instruction manual. |
| 〔3〕 | With the teaching box, check the Z-axis value of the center of wafer thickness in the first slot (lowest slot) (see Figure 1) and set the value (see Figure 2). |
| 〔4〕 | Set the point data via serial communication. Input the following commands for configuration: 
(When the robot is $1, the commands are: $1WLO ****) Input the Z-axis value displayed in the teaching box in "DEC". Obtain the current designated dataData to be set |
Figure 1
Figure 2
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