Wafer-Search Operation Procedure
Prepare the necessary equipment for wafer-search
- Necessary equipment:
- Instruction manual of robot
- Personal computer
- RS232C serial communication cable
- Teaching box
- Cassettes and wafers as many as the number of cassette slots
Place wafers to all the slots in the cassette and set them to the position where wafer-search is started.
Next, set the parameters necessary for wafer-search. Set them as the following procedures.
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