Introduction Video of Handling

Automatic wafer transfer system for wafer container

SSY-11010 (Automatic wafer transfer system for wafer container): High accuracy handling of thin wafer inside the wafer container and cassette. Equipped with mechanism of automatic lid opening/closing of the wafer container (Patent pending). Automatic recognition of wafer and the spacer (interlayer paper) in the wafer container. Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage). Available for thin wafer as equipped with Bernoulli end-effector.