System

High accuracy handling of thin wafer inside the wafer container and cassette.
Equipped with mechanism of automatic lid opening/closing of the wafer container (Patent pending).

• Automatic recognition of wafer and the spacer (interlayer paper) in the wafer container.
• Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage).
• Available for thin wafer as equipped with Bernoulli end-effector.
• Automatic recognition of the height of wafer.
• The number of cassettes and the wafer sizes can be customized.
• Corresponding to the wafer container made by Achilles Corporation.
• Two fan filter units (HEPA) are installed to ensure the cleanliness.
• Color sensor allows spacers (interlayer papers) with different colors to be detected easily.