Robot for Semiconductor
STCR4130S4-Axis Cylindrical Coordinate Clean Robot
Product Video |
Usage Environment/SpecificationsProduct Profile
List of Product Model
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Characteristics
Designed for handling small wafers in a production line or inspection line of semiconductor.
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Twin-arm reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Specifications of Robot | ||||
|---|---|---|---|---|
| Robot Model | STCR4130S-200-PM | |||
| Carrying Object | Wafer up to 300mm | |||
| Wafer Holding Method | By vacuum suction | |||
| Robot Model Type | Cylindrical coordinate type | Control Axis | 4-axis | |
| Motor Type | Stepping motor | |||
| Operating Range | From the robot center to the wafer center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 515mm | 340deg | 200mm | ||
| Carrying Speed (Ave.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 470mm/sec | 220deg/sec | 170mm/sec | ||
| Carrying Speed (Max.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 940mm/sec | 270deg/sec | 210mm/sec | ||
| Repeatability | Within ±0.1mm | |||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
| Utility | Power: DC24V±10% 16A; Vacuum: -53kPa or more | |||
| Mass | Approx. 30kg | |||
| Specifications of Controller | ||||
| Controller Model | C4000 series | |||
| Interface | RS232C and parallel photo I/O | |||
| Outline Drawing (Standard) |
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Option
Wrist-Block Unit
| Model Name | Total Length | Mapping Sensor | Thickness of Attaching End-Effector |
|---|---|---|---|
| SART08674 | 60mm | 2mm | |
| SART08604 | 60mm | 2mm | |
| SART08675 | 155mm | 2mm | |
| SART08661 | 155mm | Available | 2mm |
| SART08676 | 60mm | 2mm | |
| SART08668 | 60mm | Available | 2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
| Model Name | Size of Carrying Object | End-effector Type (Thickness) | Wafer Holding Method |
|---|---|---|---|
| SC-IW-200 | 3 inch, 100mm to 200mm | I-shape (2mm) | Vacuum suction |
| SC-IW-240 | 3 inch, 100mm to 300mm | I-shape (2mm) | Vacuum suction |
| SC-YW-200 | 100mm to 200mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-227 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-240 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| 3D-02229 | 150mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC3-YW-240 | 300mm | Y-shape (3mm) | Vacuum suction |
| 3D-01661 | 300mm | Y-shape (3mm) | Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
| End-Effector/Wrist-Block Unit | SART08674 | SART08604 | SART08675 | SART08661 | SART08676 | SART08668 |
|---|---|---|---|---|---|---|
| SC-IW-200 | 405mm | 405mm | 500mm | 500mm | 405mm | 405mm |
| SC-IW-240 | 445mm | 445mm | 540mm | 540mm | 445mm | 445mm |
| SC-YW-200 | 415mm | 415mm | 510mm | 510mm | 415mm | 415mm |
| SC-YW-227 | 442mm | 442mm | 537mm | 537mm | 442mm | 442mm |
| SC-YW-240 | 455mm | 455mm | 550mm | 550mm | 455mm | 455mm |
| 3D-02229 | 455mm | 455mm | 550mm | 550mm | 455mm | 455mm |
| SC3-YW-240 | 455mm | 455mm | 550mm | 550mm | 455mm | 455mm |
| 3D-01661 | 455mm | 455mm | 550mm | 550mm | 455mm | 455mm |
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Single arm
- ...Twin arm
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking