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3D-01661Vacuum Type End-Effector

Usage Environment/Specifications

Product Profile

Model Name	3D-01661
Carrying Size	300mm
Carrying Object	Mainly silicon wafer

Characteristics

Y-shaped vacuum suction type end-effector, suitable for handling 300mm wafer (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.

Standard Specifications

Carrying Object	SEMI standard 300mm (Mainly silicon wafer)
Material	High purity alumina ceramic sintered body
Surface Treatment	Conductive Teflon coating
Wafer Holding Method	Vacuum suction
Total Length	242mm
Thickness	3mm

Please contact us for the detailed specifications.

Outline Drawing (Standard)

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking