Robot for Semiconductor
SCR3160CSN (Closed-loop control)3-Axis Cylindrical Coordinate Clean Robot
Product Video |
Usage Environment/SpecificationsProduct Profile
List of Product Model
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Characteristics
Path planning handling has joined the lineup of clean robot with the closed-loop control.
Access to the chamber stage arranged in parallel without a track improves the flexibility in the layout design and the cost-performance.
*Click to go to the page of the path planning handling video.
New type of 3-axis cylindrical coordinate type single-arm clean robot
For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
- High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
- Reduced origin search time: By absolute encoder
- Equipped with the batteryless multi-rotation absolute sensor
- Robot replacement is available: Compatible with conventional model (installation/performance)
- High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable according to the customer’s system layout.
- Bernoulli end-effector is available (option)
Standard Specifications
| Specifications of Robot | ||||
|---|---|---|---|---|
| Robot Model | SCR3160CSN-300-CM | |||
| Carrying Object | Wafer up to 300mm (Available for various types of wafers) | |||
| Wafer Holding Method | By vacuum suction | |||
| Robot Model Type | Cylindrical coordinate type | Control Axis | 3-axis | |
| Motor Type | Stepping motor (Closed-loop) | |||
| Operating Range | From the robot center to the wafer center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 552.7mm | 340deg | 300mm | ||
| Carrying Speed (Ave.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 610mm/sec | 340deg/sec | 250mm/sec | ||
| Carrying Speed (Max.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 1220mm/sec | 500deg/sec | 320mm/sec | ||
| Resolution | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| Below 10.0µm | 0.0015deg | 2.0µm | ||
| Repeatability | Within ±0.1mm | |||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
| Utility | Power: DC24V±10% 10A Vacuum: -53kPa or more | |||
| Specifications of Controller | ||||
| Controller Model | C4000B series | |||
| Interface | RS232C and parallel photo I/O | |||
| Outline Drawing (Standard) |
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Option
Wrist-Block Unit
| Model Name | Total Length | Mapping Sensor | Thickness of Attaching End-Effector |
|---|---|---|---|
| SARS00169 | 38mm | None | 2mm |
| SARS00958 | 38mm | None | 3mm |
| SARS02659 | 75mm | None | 2mm |
| SARS02967 | 75mm | None | 3mm |
| SARS08603 | 80mm | Transmissive sensor/Reflective sensor | 2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
| Model Name | Size of Carrying Object | End-effector Type (Thickness) | Wafer Holding Method |
|---|---|---|---|
| SC-IW-200 | 3 inch, 100mm to 200mm | I-shape (2mm) | Vacuum suction |
| SC-IW-240 | 3 inch, 100mm to 300mm | I-shape (2mm) | Vacuum suction |
| SC-YW-200 | 100mm to 200mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-227 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-240 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| 3D-02229 | 150mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC3-YW-240 | 300mm | Y-shape (3mm) | Vacuum suction |
| 3D-01661 | 300mm | Y-shape (3mm) | Vacuum suction |
| SC3-IW-240 | 300mm | I-shape (3mm) | Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
| End-Effector/Wrist-Block Unit | SARS00169 | SARS02659 | SARS08603 | SARS00958 | SARS02967 |
|---|---|---|---|---|---|
| SC-IW-200 | 502.7mm | 565mm | 570mm | - | - |
| SC-IW-240 | 542.7mm | 605mm | 610mm | - | - |
| SC-YW-200 | 512.7mm | 575mm | 580mm | - | - |
| SC-YW-227 | 539.7mm | 602mm | 607mm | - | - |
| SC-YW-240 | 552.7mm | 615mm | 620mm | - | - |
| 3D-02229 | 552.7mm | 615mm | 620mm | - | - |
| SC3-YW-240 | - | - | - | 552.7mm | 615mm |
| 3D-01661 | - | - | - | 552.7mm | 615mm |
| SC3-IW-240 | - | - | - | 542.7mm | 605mm |
Other Option
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Single arm
- ...Twin arm
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking