Robot for Semiconductor
SCR3130CS3-Axis Cylindrical Coordinate Clean Robot
Product Video |
Usage Environment/SpecificationsProduct Profile
List of Product Model
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Characteristics
Designed for handling small wafers in a production line or inspection line of semiconductor.
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Specifications of Robot | ||||
|---|---|---|---|---|
| Robot Model | SCR3130S-200-PM | |||
| Carrying Object | Wafer up to 300mm | |||
| Wafer Holding Method | By vacuum suction | |||
| Robot Model Type | Cylindrical coordinate type | Control Axis | 3-axis | |
| Motor Type | Stepping motor | |||
| Operating Range | From the robot center to the wafer center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 492.7mm | 340deg | 200mm | ||
| Carrying Speed (Ave.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 500mm/sec | 340deg/sec | 200mm/sec | ||
| Carrying Speed (Max.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 1000mm/sec | 500deg/sec | 250mm/sec | ||
| Repeatability | Within ±0.1mm | |||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
| Utility | Power: DC24V±10% 15A; Vacuum: -53kPa or more | |||
| Mass | Approx. 20kg | |||
| Specifications of Controller | ||||
| Controller Model | C4000 series | |||
| Interface | RS232C and parallel photo I/O | |||
| Outline Drawing (Standard) |
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Option
Wrist-Block Unit
| Model Name | Total Length | Mapping Sensor | Thickness of Attaching End-Effector |
|---|---|---|---|
| SARS00169 | 38mm | None | 2mm |
| SARS00958 | 38mm | None | 3mm |
| SARS02659 | 75mm | None | 2mm |
| SARS02967 | 75mm | None | 3mm |
| SARS08603 | 80mm | Transmissive sensor/Reflective sensor | 2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
| Model Name | Size of Carrying Object | End-effector Type (Thickness) | Wafer Holding Method |
|---|---|---|---|
| SC-IW-200 | 3 inch, 100mm to 200mm | I-shape (2mm) | Vacuum suction |
| SC-IW-240 | 3 inch, 100mm to 300mm | I-shape (2mm) | Vacuum suction |
| SC-YW-200 | 100mm to 200mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-227 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC-YW-240 | 100mm to 300mm | Y-shape (2mm) | Vacuum suction |
| 3D-02229 | 150mm to 300mm | Y-shape (2mm) | Vacuum suction |
| SC3-YW-240 | 300mm | Y-shape (3mm) | Vacuum suction |
| 3D-01661 | 300mm | Y-shape (3mm) | Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
| End-Effector/Wrist-Block Unit | SARS00169 | SARS02659 | SARS08603 | SARS00958 | SARS02967 |
|---|---|---|---|---|---|
| SC-IW-200 | 357.7mm | 420mm | 425mm | - | - |
| SC-IW-240 | 397.7mm | 460mm | 465mm | - | - |
| SC-YW-200 | 367.7mm | 430mm | 435mm | - | - |
| SC-YW-227 | 394.7mm | 457mm | 462mm | - | - |
| SC-YW-240 | 407.7mm | 470mm | 475mm | - | - |
| 3D-02229 | 407.7mm | 470mm | 475mm | - | - |
| SC3-YW-240 | - | - | - | 407.7mm | 470mm |
| 3D-01661 | - | - | - | 407.7mm | 470mm |
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Single arm
- ...Twin arm
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking