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Troubleshooting of Wafer Search Operation

7: Some wafers cannot be detected with wafer-search.

When the orientation flat surface is in the direction of sensor detection, some models (sensors) may not detect wafers.
Please refer to the specification.

The reflective sensor may not detect wafers from the front of wafers.
When teaching, make sure that the position is slightly off the front of wafers.

For the sensor using a reflect board, make sure that the teaching has been set at right angle to the reflect board.
When the teaching has not been set at right angle to the reflect board, the amount of incident light decreases and wafers may not be detected correctly.

When the speed of wafer-search becomes faster, the detection width tends to be smaller than the actual wafer width.
Refer to “8: Setting of the speed of wafer search (WSP setting)” of Wafer-Search Operation Procedure and set it smaller. Also refer to “4: Setting of the minimum detection width of wafer (WWN setting)” of Wafer-Search Operation Procedure and change the setting.
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