Introduction of product videos exhibited at Semicon JAPAN 2025
Please take a look at the lineup of our exhibition robots for Semicon JAPAN 2025.
Please feel free to contact us for more information about exhibition robots and our products.
DTVFR -Ultra-High Vacuum Transfer Robot-
Capable of transfer in an ultra-high vacuum environment.
This ultra-high vacuum robot revolutionizes reliability and efficiency in next-generation semiconductor manufacturing.
Cutting-edge transfer technology, which is designed to meet miniaturization and high-purity requirements.
This robot’s vacuum resistance and leak rate boast world class standards.
SSY -EFEM with N₂ Purge Capability-
By increasing N₂ concentration in the wafer transfer area, oxygen and water vaper concentrations are decreased, reducing the risk of wafer oxidation.
By limiting the N₂ atmosphere area, N₂ consumption is reduced by approximately 50% compared to the specifications that purges the entire EFEM with N₂.