SEMICON JAPAN 2025
Thank you very much for coming to our exhibition booth.
For more information on our products as well as the
exhibited products below, please go to the product page or contact us.
- Date
- Wed., December 17 to 19, 2025
- Venue
- Tokyo Big Sight, Japan
- Booth
- East Exhibition Hall 5 (Back-End Process Zone) E5636
- Access Map & Floor Plan
- Products for Exhibition
JEL booth in SEMICON JAPAN 2025
Access Map & Floor Plan
Products for Exhibition
■DTVFR -Ultra-High Vacuum Transfer Robot-
■SSY -EFEM with N₂ Purge Capability-