Introduction Video of Handling
Susceptor/Tray Handling
STCR4160S (susceptor/tray handling): Designed for handling susceptor/tray used for LED processing system. Wafer taken out of a cassette is transferred to the susceptor/tray, which can be automatically transferred to the system by combining with SSY-10020. *Also available for vacuum robot: SVCR3330S (susceptor/tray handling). |
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