System
SSY-10020 (Loader/Unloader System)Wafer transfer system
Product Video |
Usage Environment/SpecificationsProduct Profile
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Characteristics
New type of wafer handling system for wafers including LED.
- Automatic loader/unloader for batch processing such as susceptors or trays is achieved.
- Aligner is installed both for wafers and susceptors, which provides the centering and indexing of wafer notch and susceptors.
Standard Specifications
Contact us for the detailed specifications.
| Outline Drawing (Standard) |
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Option
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking