System

SSY-20010Automatic wafer transfer system for wafer container

Product Model	SSY-20010
Environment	Clean room atmosphere
Applicable Cassette Type	300 mm container, 300 mm wafer cassette
Wafer Size	300 mm
Carrying Object	Silicon wafer, spacer (interlayer paper)
Carrying Object	Various wafer sizes are available. Contact us for the number of wafer containers and cassettes, or aligner installation.

High accuracy transport of thin wafer in the wafer container.

Automatic wafer transfer between the wafer container and the wafer cassette.
Available for thin wafer as equipped with Bernoulli end-effector.
Automatic identification of wafer and the spacer (interlayer paper).
Automatic identification of the height of wafer.
The number of cassettes and the wafer sizes can be customized.
Automatic lid opening/closing of the wafer container.
Wafer container : made by Achilles Corporation.
Fan filter unit (HEPA) is installed for the cleanliness.
Color sensor allows spacers (interlayer papers) with different colors to be detected easily.
(Please contact JEL for details.)

Various wafer sizes are available. Contact us for the number of wafer containers and cassettes, or aligner installation.
Carrying Object	300 mm silicon wafer, 300 mm spacer (interlayer paper)
Applicable Cassette Type	300 mm wafer container, 300 mm cassette (FOUP)
Cleanliness	Fan filter units is installed.
External Dimensions	1350 (W) x 1434 (D) x 1900 (H) (mm)
Utility	Power: AC200V±10% Clean air: 0.5 MPa 250 NL/min or more Vacuum: -70kPa or more
Mass	450 kg

Outline Drawing (Standard)