Troubleshooting of Wafer Search Operation

9: A wafer cannot be detected when wafer-search is started after cassettes have been changed.

Wafer-search operation for multiple cassettes

When executing wafer-search for multiple cassettes, in case the data of each cassette is different, change the data setting first before starting the wafer-search of the cassette.
Set the point of the start position of wafer-search and teach according to cassette in advance.

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