Troubleshooting of Wafer Search Operation
2: Error “E08” or “Command Error” occurs and wafer-search does not start.
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For the sensor using a heat shield plate, make sure that teaching has been set at the position where the sensor is reflected at the heat shield plate correctly. When the sensor is reflected at other than the heat shield plate, wafers cannot be detected correctly. |
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Doesn't the sensor react at other than wafers? Check if the sensor has not detected frames behind cassettes or other things. |
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