Introduction of product videos exhibited at Semicon Japan 2024

JFR -PLP Transfer Robot-

PLP (600 mm x 600 mm, Max.4kg) can be transferred in a parallel layout with high-speed and low vibration.
Horizontal and multi-joint robot to access 2 ports.
With non-contact alignment function in the robot hand, the robot alone can position the PLP.

SSY -EFEM with φ300 mm-

2 ports access is available by path-planning.
By combining our diverse range of robots, such as track-axis and horizontal multi-joint robots, access to more than 3 ports is also available.

STVCR -Vacuum Wafer Transfer Robot-

Long-selling robot to handle various types of wafers up to φ300 mm in vacuum environment.
Twin arm reduces the wafer swap time. High-speed transfer and improved throughput with contact type resin pads.

For SEMICON JAPAN 2024 page.