Robot for Semiconductor

SWCR3160CS (Waterproof)3-Axis Cylindrical Coordinate Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	SWCR3160CS
Environment	Clean room atmosphere
Arm	Single arm
Operating Range	312mm (3rd joint center)
Vertical Stroke	200mm / 300mm
Payload Capacity	Below 3kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
SWCR3160CS-200-PM		200mm
SWCR3160CS-300-PM		300mm

The image above and the video are of SWCR3160CS-200-PM (Waterproof).

Characteristics

Designed for handling 300mm wafers in a LSI production line under the condition of acid or alkaline mist (IP64).
Flip and edge grip functions are available.

Corrosion protection for arm by Teflon coating
V-type seals are used for waterproof of arm joint.
Viton seals are used for parts joint.
Bellows are used for waterproof of vertical axis.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with edge grip type end-effector.
Specifications of Robot
Carrying Object	Wafer up to 300mm
Wafer Holding Method	By edge grip
Robot Model Type	Cylindrical coordinate type	Control Axis	3-axis
Motor Type	Stepping motor
Operating Range	From the robot center to the wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	312mm	340deg	300mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	250mm/sec	120deg/sec	70mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	500mm/sec	160deg/sec	85mm/sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 49µm	0.0214deg	Below 12.5µm
Handling level	255mm (Mounting level to end-effector level)
Repeatability	Within ±0.2mm
Utility	Power: DC24V±10% 15A; Positive pressure: 0.15MP
Specifications of Controller
Controller Model	C4000 series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking