Robot for Semiconductor

SVCR32603-Axis Cylindrical Coordinate Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	SVCR3260
Environment	Vacuum (Temp. 15°C to 50°C)
Environment	Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Arm	Single arm
Operating Range	520mm (3rd joint center)
Vertical Stroke	20mm / 40mm
Payload Capacity	2kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
SVCR3260-020-PM		20mm
SVCR3260-040-PM		40mm

The image above and the video are of SVCR3260-040-PM.

Characteristics

Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to SVHR series.
Compatible with SVHR series and it is possible to replace or upgrade into SVCR series.

Magnetic fluid sealing is used for arm joint.
Vacuum sealing: Magnetic fluid sealing and bellows are used.
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
Servo motor type is available.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with passive edge or edge grip type End-effector.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of SVCR3260-040-PM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	SVCR3260-040-PM
Carrying Object	Wafer up to 300mm
Robot Model Type	Cylindrical coordinate type	Control Axis	3-axis
Motor Type	Stepping motor
Operating Range	3rd joint center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	520mm	330deg	40mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	300mm/sec	120deg/sec	20mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	550mm/sec	170deg/sec	30mm/sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 82µm	0.009deg	1.25µm
Handling level	98mm (Mounting level to upper end-effector level
Repeatability	Within ±0.1mm
Cleanliness	Magnetic fluid sealing and filter
Vacuum resistance	1.33×10^-6Pa
Utility	Power: DC24V±10% 8A
Specifications of Controller
Controller Model	C4000 series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking