Robot for Semiconductor

STCR4160S (with flip unit)4-Axis Cylindrical Coordinate Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	STCR4160S
Environment	Clean room atmosphere
Arm	Twin arm
Operating Range	315mm (3rd joint center)
Vertical Stroke	200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
Payload Capacity	3kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
STCR4160S-200-PM		200mm
STCR4160S-300-PM		300mm
STCR4160S-400-PM		400mm
STCR4160S-450-PM		450mm
STCR4160S-500-PM		500mm
STCR4160S-550-PM		550mm
STCR4160S-600-PM		600mm

The image above and the video are of STCR4160S-300-PM (with flip unit).

Characteristics

Transfer for thin wafers by using our Bernoulli type end-effector.
Energy-saving design by installing stepping motor in all axes.
Twin arm reduces the wafer swap time.
Flip unit is installed at both arms.
Base or flange mounting type is selectable.

Standard Specifications

Example of standard specifications with JEL Bernoulli end-effector.
Specifications of Robot
Robot Model	STCR4160S-300-PM
Carrying Object	SEMI standard 150, 200mm silicon wafer
Wafer Holding Method	By Cyclone pad suction and friction generated by friction rubber (Various materials are available for contact parts.)
Robot Model Type	Cylindrical coordinate type	Control Axis	4-axis
Motor Type	Stepping motor
Operating Range	From the robot center to the wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	640mm	340deg	300mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	500mm/sec	180deg/sec	200mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	1230mm/sec	300deg/sec	250mm/sec
Cleanliness	ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility	Power: DC24V±10% 16A; Positive pressure air: 60 SLM or more (2-vacuum line), 0.1 to 0.3 MPa
Mass	Approx. 30kg
Specifications of Controller
Controller Model	C4000 series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)

Option

Wrist-Block Unit

Model Name	Total Length	Mapping Sensor	Thickness of Attaching End-Effector
SART08674	60mm		2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking