Robot for Semiconductor

SSCR3090S (For small wafer)3-Axis Cylindrical Coordinate Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	SSCR3090S
Environment	Clean room atmosphere
Arm	Single arm
Operating Range	175mm (3rd joint center)
Vertical Stroke	150mm
Payload Capacity	Below 0.1kg (wafer only, calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
SSCR3090S-150-PM		150mm

The video is of SSCR3090S and SAL2241.

Characteristics

Designed for handling small wafers in a production line or inspection line of semiconductor or LED production.
Minimized footprint and lightened weight compactify the system layout.

Arm lineup: 90mm
It has compatible unit with SSCR2090S-PM and can be changed into link arm type and Z-axis less type.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge type End-effector.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model	SSCR3090S-PM
Carrying Object	Up to 100mm wafer
Wafer Holding Method	By vacuum suction
Robot Model Type	Cylindrical coordinate type	Control Axis	3-axis
Motor Type	Stepping motor
Operating Range	From the robot center to the wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	300mm (Link arm type)	370deg	150mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	220mm/sec	180deg/sec	120mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	330mm/sec	280deg/sec	160mm/sec
Repeatability	Within ±0.1mm
Cleanliness	ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility	Power: DC24V±10% 4A; Vacuum: -53kPa or more
Specifications of Controller
Controller Model	C4301 series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking