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Passive-edge Holding Type End-Effector

Usage Environment/Specifications

Product Profile

Model Name	Passive-edge Holding Type End-Effector
Carrying Size	Various sizes are available.
Carrying Size	Contact us for the detailed specifications.

Characteristics

Suitable for handling warped wafer or thin wafer that cannot be held properly with the standard vacuum suction type end-effector.
Designed for handling wafer that can be contacted with the backside of the wafer edge or edge part.
Under the wafer's own weight, tapered guide is used to hold wafer (passive grip).

Reasonably priced end-effector for handling contact-limited wafer with wafer edge
Check the wafer presence with substrate existence sensor in atmospheric condition (option)

Specifications

Material	End-effector: Ceramic, Al, CFRP
Surface Treatment	Conductive Teflon coating

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking