Robot for FPD

LVHR3440S (FPD glass substrate)3-Axis Cylindrical Coordinate Clean Robot

Model Name	LVHR3440S
Environment	Clean room atmosphere (Temp. 15°C to 40°C)
Environment	*Vacuum robot:vacuum chamber temp. 15°C to 50°C or less
Arm	Single arm
Operating Range	880mm (3rd joint center)
Vertical Stroke	20mm/ 32mm/ 40mm/ 60mm/ 320mm
Payload Capacity	Below 10kg (calculated for the arm 3rd joint)

Designed for handling FPD substrate in a PFD production line or inspection line.

Arm lineup: 330mm, 440mm, 500mm, 550mm
Magnetic fluid sealing are used for arm joint.
Vacuum sealing: Magnetic fluid sealing and bellows are used.
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
AC servo motors with absolute encoders installed in all axes.
High-speed, high-accuracy glass handling by S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Representative specifications of LVHR3440S-040-SM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	LVHR3440S-040-SM
Carrying Object	730mm×920mm×1.1mm FPD glass substrate(representative example)
Robot Model Type	Cylindrical coordinate type	Control Axis	3-axis
Motor Type	AC servo motor
Operating Range	3rd joint center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	880mm	±182deg	40mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	1320mm/2.7sec	180deg/1.8sec	40mm/2.0sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 13.5µm	0.00097deg	0.61µm
Handling level	168.5mm (Mounting level to upper end-effector level
Repeatability	Within ±0.2mm
Cleanliness	Magnetic fluid sealing and filter
Utility	Power: AC200V single phase ±10% 2kVA

Outline Drawing (Standard)

*Click the items below to review the end-effectors other than JEL standard types.