Robot for FPD

LHR3400C (FPD glass substrate)3-Axis Cylindrical Coordinate Clean Robot

Usage Environment/Specifications

Product Profile

Model Name	LHR3400C
Environment	Clean room atmosphere (Temp. 15°C to 40°C)
Environment	*Vacuum robot:vacuum chamber temp. 15°C to 50°C or less
Arm	Single arm
Operating Range	1550mm (From robot center to substrate center)
Vertical Stroke	400mm / 500mm / 600mm
Vertical Stroke	760mm / 900mm / 1500mm
Payload Capacity	Below 15kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
LHR3400C-400-AM		400mm
LHR3400C-500-AM		500mm
LHR3400C-600-AM		600mm
LHR3400C-760-AM		760mm
LHR3400C-900-AM		900mm
LHR3400C-1500-AM		1500mm

The image above is of LHR3400C-900-AM (telescope type for Z-axis: 760mm, 900mm, 1500mm).

Characteristics

Designed for handling FPD substrate in a PFD production line or inspection line.
Telescope type is available for Z-axis of 760mm or longer, which allows the low-passline.
Execution of origin search is not required by using the servo motors with absolute encoders.

Arm lineup: 400mm, 500mm, 700mm
Base or flange mounting type is selectable.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
AC servo motors with absolute encoders installed in all axes.
High-speed, high-accuracy glass handling by S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector
End-effector material: CFRP, Al, ceramic, or others.
Sensors (for alignment, substrate existence detection, mapping) can be installed in the end-effector.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of LHR3400C-600-AM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	LHR3400C-600-AM
Carrying Object	730mm×920mm×1.1mm FPD glass substrate(representative example)
Robot Model Type	Cylindrical coordinate type	Control Axis	3-axis
Motor Type	AC servo motor
Operating Range	From robot center to substrate center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	1550mm	330deg	600mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	1375mm/1.8sec	180deg/1.5sec	600mm/1.7sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 8.2µm	0.0008deg	2.4µm
Handling level	217mm (Mounting level to upper end-effector level
Repeatability	Within ±0.2mm
Cleanliness	0.3µm/cf Class 10 (at transfer level when exhausting driving)
Utility	Power: AC200V single phase ±10% 3 kVA; Vacuum: -73 kPa or more

Outline Drawing (Standard)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking