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Bernoulli Type End-Effector (Contact type)

Model Name	Bernoulli End-Effector (Contact type)

Mechanism of Bernoulli End-Effector (Contact type)

Low cost end-effector for thin or warped wafers using the Bernoulli principle
Available for any types of JEL atmospheric robots
Suitable design solutions with evaluation using sample wafers based on customer's request about the wafer conditions
Wafer holding by the friction rubber to avoid displacement during operation
Capable of handling different size of wafers with one end-effector (*Depending on the wafer size)
Thinner than the non-contact type Bernoulli end-effector
Suitable for thin wafers as the Bernoulli end-effector applies pressure to wider area of wafer compared to the vacuum suction type end-effector

Material	Aluminum
Surface treatment	Black alumite
Wafer holding	By the Bernoulli’s principle using Cyclone pad and friction rubber (H-NBR) Various materials available for the contact area
Utility	30 to 80 L/min (Varies depending on the wafer condition)

Please contact us for the detailed specifications.