SEMICON TAIWAN 2018
Thank you very much for coming to our exhibition booth.
For more information on our products as well as the exhibited products below, please go to the product page or contact us.
- Date
- September 5-7, 2018
- Venue
- Taipei Nangang Exhibition Hall, Taiwan
- Booth
- M858
- Products for Exhibition
Products for Exhibition
Twin arm robot with path planning handling
Access to the inline 2 port layout cassettes without a track.
Simultaneous movement of both theta-axis and arm (R-axis) allows horizontal movement.
Horizontal and multi-joint type single arm robot
Access to the inline 2 port layout cassettes without a track.
By moving the direction of end-effector straightly to the horizontal cassettes, edge-grip type end-effector or square substrates can be applied.
New Aligner SAL3000HV Series (full auto-adjustment version)
Full auto-adjustment software "JEL ALIGN TOOL" allows automatic alignment for various kinds of wafers.