SEMICON CHINA 2017

Thank you for coming to SEMICON CHINA 2017.
For more product information, please go to the products page or contact us.
- Date
- March 14-16, 2017
- Venue
- Shanghai New International Expo Centre (SNIEC), Shanghai
- Booth
- 1605

Products for Exhibition
Automatic wafer transfer system for wafer container

High accuracy handling of thin wafer inside the wafer container and cassette.
GCR-AM with end-effectors with rotation function

Rotation function on end-effector units shortens tact time.
Tape frame handling robot

Accessible to all slots in the cassette by random access with clip-type end-effector.
New Aligner SAL3000HV Series (full auto-adjustment version)

Self-adjustment aligner that allows alignment for various kinds of wafers. Downtime can be reduced significantly.