SEMICON China 2015
Thank you for coming to SEMICON China 2015.
For more product information, please go to the products page or contact us.
Date: March 17-19, 2015
Venue: Shanghai New International Expo Centre (SNIEC), Shanghai
Booth: 5106
Date: Mar. 17, 2015
Products for Exhibition
Robot for handling 2 inch wafer
Help to minimize transferring parts or vacuum transfer chamber.
Logger system
Suitable for the verification of an error such as wafer breakage.
Automatic wafer transfer system for wafer container
High accuracy handling of thin wafer inside the wafer container.
Table-top loader system
Available for various types of wafers; 2, 3 inch, 100mm glass, sapphire, SiC,or GaN or others.
Robot for handling 300mm wafer
Wafer handling to the 2 FOUP cassettes placed side by side is available without track axis.
Suited for the high-speed handling of 300mm-wafer in the semiconductor manufacturing equipment and inspection equipment.