Robot for Semiconductor
STCR4160SN (Closed-loop control)4-Axis Cylindrical Coordinate Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
Model Name | STCR4160SN |
Environment | Clean room atmosphere |
Arm | Twin arm |
Operating Range | 315mm (3rd joint center) |
Vertical Stroke | 200mm / 300mm / 400mm / 450mm / 500mm |
Payload Capacity | 3kg (calculated for the arm 3rd joint) |
List of Product Model
Product Model | Vertical Stroke |
STCR4160SN-200-CM | 200mm |
STCR4160SN-300-CM | 300mm |
STCR4160SN-400-CM | 400mm |
STCR4160SN-450-CM | 450mm |
STCR4160SN-500-CM | 500mm |
- The image above is of STCR4160SN-300-CM and the video shows STCR4160SN-300-PM.
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Characteristics
New type of 4-axis cylindrical coordinate type twin-arm clean robot
For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
- High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
- Reduced origin search time: By absolute encoder
- Equipped with the batteryless multi-rotation absolute sensor
- Robot replacement is available: Compatible with conventional model (installation/performance)
- High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable according to the customer’s system layout.
- Bernoulli end-effector is available (option)
Standard Specifications
Example of specifications with JEL standard end-effector (vacuum type)
Robot Model |
STCR4160SN-300-CM |
Carrying Object |
Wafer up to 300mm (Available for various types of wafers) |
Wafer Holding Method |
By vacuum suction |
Robot Model Type |
Cylindrical coordinate type |
Control Axis |
4-axis |
Motor Type |
Stepping motor (Closed-loop) |
Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
575mm |
340deg |
300mm |
Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
570mm/sec |
220deg/sec |
200mm/sec |
Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
1140mm/sec |
270deg/sec |
250mm/sec |
Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
Below 10.0µm |
0.0015deg |
2.0µm |
Repeatability |
Within ±0.1mm |
Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
Utility |
Power: DC24V±10% 10A Vacuum: -53kPa or more |
Mass |
Approx. 30kg |
Controller Model |
C4000B series |
Interface |
RS232C and parallel photo I/O |
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Option
Wrist-Block Unit
Model Name |
Total Length |
Mapping Sensor |
Thickness of Attaching End-Effector |
SART08674 |
60mm |
|
2mm |
SART08604 |
60mm |
|
2mm |
SART08675 |
155mm |
|
2mm |
SART08661 |
155mm |
Available |
2mm |
SART08676 |
60mm |
|
2mm |
SART08668 |
60mm |
Available |
2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
Model Name |
Size of Carrying Object |
End-effector Type (Thickness) |
Wafer Holding Method |
SC-IW-200 |
3 inch, 100mm to 200mm |
I-shape (2mm) |
Vacuum suction |
SC-IW-240 |
3 inch, 100mm to 300mm |
I-shape (2mm) |
Vacuum suction |
SC-YW-200 |
100mm to 200mm |
Y-shape (2mm) |
Vacuum suction |
SC-YW-227 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
SC-YW-240 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
3D-02229 |
150mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
SC3-YW-240 |
300mm |
Y-shape (3mm) |
Vacuum suction |
3D-01661 |
300mm |
Y-shape (3mm) |
Vacuum suction |
SC3-IW-240 |
300mm |
I-shape (3mm) |
Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
End-Effector/Wrist-Block Unit |
SART08674 |
SART08604 |
SART08675 |
SART08661 |
SART08676 |
SART08668 |
SC-IW-200 |
525mm |
525mm |
620mm |
620mm |
525mm |
525mm |
SC-IW-240 |
565mm |
565mm |
660mm |
660mm |
565mm |
565mm |
SC-YW-200 |
535mm |
535mm |
630mm |
630mm |
535mm |
535mm |
SC-YW-227 |
535mm |
535mm |
630mm |
630mm |
535mm |
535mm |
SC-YW-240 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
3D-02229 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
SC3-YW-240 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
3D-01661 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
SC3-IW-240 |
565mm |
565mm |
660mm |
660mm |
565mm |
565mm |
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.
Other Option
Product Lineup