Robot for FPD

FTVHR4750 (FPD glass substrate)4-Axis Vacuum Link Type Clean Robot

Usage Environment/Specifications

Product Profile

Model Name	FTVHR4750
Environment	Clean room atmosphere (Temp. 15°C to 40°C)
Environment	*Vacuum robot:vacuum chamber temp. 15°C to 50°C or less
Arm	Twin arm
Operating Range	942mm (3rd joint center)
Vertical Stroke	95mm / 105mm / 335mm
Payload Capacity	Below 30kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
FTVHR4750-095-AM		95mm
FTVHR4750-105-AM		105mm
FTVHR4750-335-AM		335mm

The image above is of FTVHR4750-095-AM.

Characteristics

Designed for handling Mask or FPD substrate in a PFD production line or inspection line.
Execution of origin search is not required by using the servo motors with absolute encoders.

Arm lineup: 550mm, 750mm, 800mm, 820mm
Superior straightness accuracy and low-particle due to the link arm system.
Twin-arm reduces the tact time.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
AC servo motors with absolute encoders installed in all axes.
High-speed, high-accuracy wafer handling by S-curved speed control.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of FTVHR4750-095-AM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	FTVHR4750-095-AM
Carrying Object	1100mm×1250mm FPD glass substrate(representative example)
Robot Model Type	Cylindrical coordinate type	Control Axis	4-axis
Motor Type	AC servo motor
Operating Range	Arm (3rd joint center)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	942mm	330deg	95mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	1924mm/2.6sec	180deg/3.5sec	95mm/2.8sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 4.8µm	0.00018deg	0.12µm
Handling level	583.5mm (Mounting level to upper end-effector level
Repeatability	R.θ-axis: Within ±0.3mm, Z-axis: Within ±0.1mm
Vacuum resistance	1.33×10^-6Pa
Utility	Power: AC200V 3 phase ±10% 4kVA

Outline Drawing (Standard)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking